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Title:
LUMINOUS FLUX CONTROLLER, INTERFERENCE DEVICE AND DIFFERENTIAL INTERFERENCE MICROSCOPE
Document Type and Number:
Japanese Patent JP2004077609
Kind Code:
A
Abstract:

To provide a luminous flux controller with which shear is easily, accurately and continuously varied without requiring any mechanical mechanism, and to provide an interference device and a differential interference microscope.

A splitting part 201 has a polarization beam splitting element and a splitting side birefringent element wherein each of them has an incident plane and a light emitting plane in parallel to each other. A luminous flux I of linearly polarized light is split into luminous fluxes O, E with the polarization beam splitting element and the fluxes become parallel to each other after passing through the splitting side birefringent element. The luminous fluxes O, E pass through a superposition part 202 having a superposition element and a superposition side birefringent element via an observation object 5. Refractive indexes of the splitting side and superposition side birefringent elements with respect to one of the luminous fluxes are electrically varied with splitting side and superposition side refractive index varying parts 214, 215. The controlling part 17 controls the splitting side and superposition side refractive index varying parts 214, 215 such that a predetermined amount Δ of sharing is achieved, and the luminous fluxes O, E are superposed at the superposition part 202.


Inventors:
FUKUSHIMA IKUTOSHI
Application Number:
JP2002235041A
Publication Date:
March 11, 2004
Filing Date:
August 12, 2002
Export Citation:
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Assignee:
OLYMPUS CORP
International Classes:
G01B9/02; G01B9/04; G01J9/02; G02B5/30; G02B21/00; G02B21/36; G02B27/28; G02F1/13; G02F1/29; (IPC1-7): G02F1/29; G01B9/02; G01B9/04; G01J9/02; G02B5/30; G02B21/00; G02B21/36; G02B27/28; G02F1/13
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Atsushi Tsuboi
Satoshi Kono
Tetsuya Kazama