Title:
エラーキャンセレーションを有するMEMSデジタル-音響トランスデューサ
Document Type and Number:
Japanese Patent JP4987201
Kind Code:
B2
Abstract:
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.
Inventors:
Robe, Wayne A.
Newman, John Jay. Jr.
Gabriel, Cagan Jay.
Newman, John Jay. Jr.
Gabriel, Cagan Jay.
Application Number:
JP2001524394A
Publication Date:
July 25, 2012
Filing Date:
September 13, 2000
Export Citation:
Assignee:
CARNEGIE-MELLON UNIVERSITY
International Classes:
B81B3/00; H04R1/02; B81B7/02; H04R1/00; H04R3/00; H04R17/00; H04R19/00; H04R19/04; H04R23/00
Domestic Patent References:
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| JPH06307960A | 1994-11-04 | |||
| JPH09325032A | 1997-12-16 | |||
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| JPH10234098A | 1998-09-02 | |||
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Attorney, Agent or Firm:
Toshiyuki Maruyama
Takao Miyano
Koichi Kitazumi
Toshiya Nagatsuka
Takao Miyano
Koichi Kitazumi
Toshiya Nagatsuka