Title:
A MEMS device which increased back capacity
Document Type and Number:
Japanese Patent JP2016521036
Kind Code:
A
Abstract:
微小電気機械システム(MEMS)マイクアセンブリが、基部及びカバーを含む。カバーは、基部に結合されて基部と共にキャビティを定める。基部は、凹部を形成し、凹部は、MEMSダイを保持するような寸法及び形状を有する。MEMSダイは、ダイアフラム及びバックプレートを含む。【選択図】図2
Inventors:
Conklin Wade
Application Number:
JP2016505509A
Publication Date:
July 14, 2016
Filing Date:
March 21, 2014
Export Citation:
Assignee:
Knowles Electronics, Limited Liability Company
International Classes:
H04R19/04; B81B7/02; H01L23/04; H01L29/84
Domestic Patent References:
JP2009253891A | 2009-10-29 | |||
JP2007158044A | 2007-06-21 | |||
JP2009038053A | 2009-02-19 | |||
JP2001054196A | 2001-02-23 | |||
JP2013533122A | 2013-08-22 |
Foreign References:
US20080298621A1 | 2008-12-04 | |||
WO2011144570A1 | 2011-11-24 | |||
US20070176272A1 | 2007-08-02 | |||
US20090274324A1 | 2009-11-05 | |||
US6594369B1 | 2003-07-15 |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuhiko Suzuki