Title:
ＭＥＭＳミラー装置及びその製造方法
Document Type and Number:
Japanese Patent JP7105934
Kind Code:
B2
Abstract:
A MEMS mirror device (3) includes a frame body (an outer movable frame body 13), an inner movable member (23), a first beam (21), a reflective mirror member (30), and a coupling member (40). The inner movable member (23) is disposed inside the frame body. The first beam (21) couples the inner movable member (23) rotatably to the frame body. The reflective mirror member (30) has a reflective surface (30r) and a rear surface (30s). The coupling member (40) couples the reflective mirror member (30) and the inner movable member (23). The first beam (21) is coupled to the inner movable member (23) at the rear surface (30s) of the reflective mirror member (30). The MEMS mirror device (3) may be reduced in size.
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Inventors:
Yoshiaki Hirata
Konno Shinken
Yasuhiko Ito
Yoshitaka Kajiyama
Konno Shinken
Yasuhiko Ito
Yoshitaka Kajiyama
Application Number:
JP2020570270A
Publication Date:
July 25, 2022
Filing Date:
February 06, 2019
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G02B26/10; B81B3/00; B81C1/00; G02B26/08
Domestic Patent References:
| JP2014191009A | ||||
| JP2014240911A | ||||
| JP2015001543A | ||||
| JP2000028937A |
Foreign References:
| US20020122238 |
Attorney, Agent or Firm:
Patent Attorney Fukami Patent Office
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