MEMS optical component - National University Corporation Kagawa University

Title:

MEMS optical component

Document Type and Number:

Japanese Patent JP5920706

Kind Code:

B2

Inventors:

Hidekuni Takao
Fumikazu Ohira
Fusao Shimokawa

Application Number:

JP2012042744A

Publication Date:

May 18, 2016

Filing Date:

February 29, 2012

Export Citation:

Assignee:

National University Corporation Kagawa University

International Classes:

G02B26/08; B81B3/00; G02B7/182

Domestic Patent References:

Attorney, Agent or Firm:

Yasunobu Yamauchi
Hiroshi Nakai
Shin Yamauchi

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