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Title:
MEMS共振器アレイ構造ならびにその動作および使用方法
Document Type and Number:
Japanese Patent JP4859924
Kind Code:
B2
Abstract:
A MEMS array structure includes MEMS resonators that form an array. Each MEMS resonator includes beam sections. At least one of the beam sections of a first one of the MEMS resonators is a shared beam section that is also included in another of the MEMS resonators adjacent to the first MEMS resonator.

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Inventors:
Lutz, Marx
Partridge, Aaron
Bread ju
Application Number:
JP2008519303A
Publication Date:
January 25, 2012
Filing Date:
May 19, 2006
Export Citation:
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Assignee:
ROBERT BOSCH GMBH
International Classes:
H03H9/24; B81B3/00
Domestic Patent References:
JP4635422B22011-02-23
JP2008546243A2008-12-18
JP2005503267A2005-02-03
JPH10106184A1998-04-24
JPH10256868A1998-09-25
JP2001508537A2001-06-26
JP2004507921A2004-03-11
JP2003532323A2003-10-28
JP2002111434A2002-04-12
JPH0642971A1994-02-18
JP2005094727A2005-04-07
Foreign References:
WO2005015735A22005-02-17
WO2003028212A22003-04-03
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Takuto Tanaka



 
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