MEMS scanning micro mirror

Japanese Patent JP6129189

B2

A MEMS micromirror (30) is presented including a frame (60) with a mirror body (50) arranged therein, a cantilever beam assembly (70) and vertical support beams (40). The mirror body (50) is rotatable around a rotation axis (58) extending in a plane (x-y) defined by the frame (60). The cantilever beam assembly (70) has a longitudinal direction and extends within said plane. The vertical support beams (40) are connected between the mirror body (50) and the frame (60) along the rotation axis (58). The cantilever beam assembly (70) has a cantilever beam (72), being coupled at a first end via relief means (74) to the frame (60) and fixed at a second end (722) to the mirror body (50). The cantilever beam (72) has a thickness, perpendicular to a plane of the frame (60), that is smaller than its width in the plane of the frame (60).

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Hendricks Wilhelms Leonardus Antonius Maria van Lilop
Matthew Alexander Herald Suyeren
Marien Johannes van Oss

JP2014534505A

May 17, 2017

October 10, 2012

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Innoruth b f

G02B26/08; B81B3/00; G02B26/10; H02N11/00

JP2002524271A
JP2008197140A
JP2005092174A
JP2006311783A
JP2008546239A
JP2007522528A

US20070120207
US20030048036
US7471441
US20100290142

Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro

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