Title:
MEMS SENSOR
Document Type and Number:
Japanese Patent JP2017198472
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a MEMS sensor which can perform a proximity sense measurement and a tactile sense measurement without requiring switches of measurement circuits.SOLUTION: There are provided MEMS sensors 1 and 1' for a visual sense measurement and a tactile sense measurement, the sensors including: a translucent elastic member 4; and at least one detecting elements 5, 5' buried in the translucent elastic member 4. The detecting elements 5, 5' include: two terminals 54A and 54B above a semiconductor layer 52 with an insulating layer 53 in between; a cantilever 55 connected to the semiconductor layer 52 at an end of the cantilever and deformed in response to the contact of an object with the translucent elastic member 4; and a strain gauge 56 on the cantilever 55, connected to the two terminals 54A and 54B at the edges. Applying an AC voltage or a DC voltage to the semiconductor layer 52 and the strain gauge 56 serves to detect an approaching force and a contacting force.SELECTED DRAWING: Figure 3
Inventors:
SAMUKAWA MASAYUKI
Application Number:
JP2016087138A
Publication Date:
November 02, 2017
Filing Date:
April 25, 2016
Export Citation:
Assignee:
UNIV NIIGATA
International Classes:
G01D21/02; G01L1/18; G01L5/16
Attorney, Agent or Firm:
Kenji Sugimura
Kyoichi Saito
Takuro Abe
Kyoichi Saito
Takuro Abe
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