Title:
ＭＥＭＳセンサ
Document Type and Number:
Japanese Patent JP6718401
Kind Code:
B2
Abstract:
This MEMS sensor comprises a first MEMS (a first MEMS and a drive circuit therefor) and a second MEMS (a second MEMS and a drive circuit therefor). This MEMS sensor comprises: a voltage application unit (a booster circuit) which applies a voltage to the first MEMS and the second MEMS; and a switching unit (a switch) which sets a first voltage that is applied to the first MEMS by means of the voltage application unit when the first MEMS is driven and a second voltage that is applied to the second MEMS by means of the voltage application unit when the second MEMS is driven to different values.
Inventors:
Makoto Takahashi
Shun Oshima
Shun Oshima
Application Number:
JP2017045193A
Publication Date:
July 08, 2020
Filing Date:
March 09, 2017
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01P21/00; B81B7/02; G01C19/5776; H01L29/84
Domestic Patent References:
| JP2011254193A | ||||
| JP200997932A | ||||
| JP2002311045A |
Foreign References:
| WO2013145828A1 | ||||
| US20110023605 |
Attorney, Agent or Firm:
Tsutsui International Patent Office