Title:
MEMSスイッチ及びその製造方法
Document Type and Number:
Japanese Patent JP4260825
Kind Code:
B2
Abstract:
A MEMS switch includes a lower substrate having a signal line on an upper surface of the lower substrate; an upper substrate, having a cavity therein, disposed apart from the upper surface of the lower substrate by a distance, and having a membrane layer on a lower surface of the upper substrate; a bimetal layer formed in the cavity of the upper substrate on the membrane layer; a heating layer formed on a lower surface of the membrane layer; and a contact member formed on a lower surface of the heating layer. The contact member can come into contact with or separate from the signal line. A method for manufacturing the MEMS switch includes preparing the upper and lower substrates and combining them so that a surface having the signal line faces a surface having the contact member and the upper and lower substrates are disposed apart by a distance.
Inventors:
Golden bell
Song Tora
Lee Sou
Shou Asahi
Kimdeok
Park Yoo
Kibun Chung
Hong Yu Sawa
Entertainment
Yoon Tin
Minami Kosuke
Song Tora
Lee Sou
Shou Asahi
Kimdeok
Park Yoo
Kibun Chung
Hong Yu Sawa
Entertainment
Yoon Tin
Minami Kosuke
Application Number:
JP2006195341A
Publication Date:
April 30, 2009
Filing Date:
July 18, 2006
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
H01H61/00; B81B3/00; B81C1/00; B81C3/00; H01H49/00
Domestic Patent References:
| JP11176306A | ||||
| JP2003178663A |
Attorney, Agent or Firm:
Yukio Ono
Tomoko Inazumi
Tomoko Inazumi