変形する薄膜を備えたMEMSスイッチ

Title:

変形する薄膜を備えたMEMSスイッチ

Document Type and Number:

Japanese Patent JP2008515150

Kind Code:

A

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Inventors:

Chui, Clarence
Clams, Manish

Application Number:

JP2007533542A

Publication Date:

May 08, 2008

Filing Date:

September 14, 2005

Export Citation:

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Assignee:

IDC, LLC

International Classes:

H01H59/00; B81B3/00; B81C1/00; H01H49/00

Attorney, Agent or Firm:

Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Ryo Hashimoto
Tetsuya Kazama

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