To cut and machine a micropart having a complex three-dimensional shape in high precision.

A tool 20 for machining is supported on a tool base 14, and the tool base 14 is held on a base 11 free to displace. The tool 20 is driven by giving high frequency vibration to the tool 20 for machining by an oscillator 27 to which high frequency electric power is supplied from a high frequency electric power source. Actual machining speed of the tool 20 against an article 22 to be machined is increased higher than peripheral velocity by the number of rotation of the article 22 to be machined by giving relative displacement by an actuator 31 between the base 11 and the tool base 14.