PURPOSE: To remove burr easily by machining the bottom of groove into an arched shape having center on the rotor side so that the burr will bend toward the opposite side from a substrate, i.e., toward a contacting member such as a rotor, and raising the burr in the opposite direction from the resilient substrate.

CONSTITUTION: Since a grinding wheel has a locus as shown by a dot and dash line, the bottom 1CC of a groove 1A takes an arched shape having the center at one known point on the side of a rotor friction contacting with a contacting part 1B. Consequently, a burr 1DD bends toward the opposite side from a substrate 1E and rises at the time of machining. Since the burrs can be removed through barrel polishing, for example, machining time and machining cost of a resilient member can be reduced by a factor of about 10 as compared with conventional method. Consequently, an oscillation wave motor can be manufactured with low cost.