To obtain a macro inspection device that is constituted to accurately obtain the coordinate value data corresponding to the position of the defect of an object to be measured even when the object is moved to an arbitrary position.
This macro inspection device which visually inspects the object to be measured placed on a suction base for defects is provided with an X-Y moving mechanism which can rotate the object in the X- and Y-directions, a θ-moving mechanism which can rotate the object in the θ-direction, and a PXPY stage which can move in parallel with the object. This device is constituted to measure the coordinates of the position of the defect of the object while the defect is indicated by means of a laser pointer provided on the PXPY stage and to transfer the coordinate value data to another inspection device.
TOMINAGA KAN
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