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Patent Searching and Data


Title:
MAGAZINE CONVEYOR
Document Type and Number:
Japanese Patent JPS63262325
Kind Code:
A
Abstract:

PURPOSE: To improve the degree of cleanness by attaching a magnet to a piston in a cylinder, while installing it in a magazine moving body as well, and making the moving body so as to be moved by the piston by means of magnetic attraction, in case of a device which conveys a magazine to a clean room.

CONSTITUTION: With gas taken in from both sides of a cylinder tube 4, a piston 30 is moved in both directions. For example, it is moved to the right with the gas taken in from the left. With this movement, a mover body 2 also moves together with the piston 30 by attraction of a magnet 32 at the side of the piston 30 and another magnet 42 at the side of this mover body 2. With this, the block (unillustrated herein) mounted with the magazine engaged with the mover body 2 is also moved, thus the magazine can be moved. With this constitution, conveyance of the magazine can be automated, thus the degree of cleanness is improved.


Inventors:
KASAHARA TAKASHI
Application Number:
JP9791387A
Publication Date:
October 28, 1988
Filing Date:
April 20, 1987
Export Citation:
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Assignee:
JEOL LTD
International Classes:
B65G25/06; H01L21/677; H01L21/68; H05K13/02; (IPC1-7): B65G25/06; H01L21/68; H05K13/02
Attorney, Agent or Firm:
Ijima Fujiharu