Title:
Magnetic Annealing device
Document Type and Number:
Japanese Patent JP6134172
Kind Code:
B2
Inventors:
Yuji Ono
Toru Ishii
Makoto Saito
Mitsuru Ohara
Yasushi Takeuchi
Toru Ishii
Makoto Saito
Mitsuru Ohara
Yasushi Takeuchi
Application Number:
JP2013058324A
Publication Date:
May 24, 2017
Filing Date:
March 21, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; F27B17/00; F27D3/12
Domestic Patent References:
| JP2004263206A | ||||
| JP2012146984A | ||||
| JP2001068527A | ||||
| JP2002175998A | ||||
| JP2008235934A | ||||
| JP10022192A | ||||
| JP8078349A | ||||
| JP2010050301A | ||||
| JP2006295159A | ||||
| JP2004214392A |
Foreign References:
| WO2010074130A1 | ||||
| WO2012000663A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito