Title:
MAGNETIC BEARING DEVICE AND VACUUM PUMP
Document Type and Number:
Japanese Patent JP2023034065
Kind Code:
A
Abstract:
To provide a magnetic bearing device and a vacuum pump capable of measuring a natural vibration mode of a rotor with high sensitivity in a levitation system using a magnetic bearing.SOLUTION: In a step 1, an operation in a second operation mode is started. In a step 3, a gain of a controller 7 is increased with respect to a gain in a first operation mode. In a step 5, a natural frequency is measured in this state is measured. Natural vibration to be measured is a bending mode of a rotor 103, a natural vibration mode of a rotary blade 102, a vibration mode caused by a stator, and a rigid body mode of the rotor 103. Arithmetic processing is performed by a central processing unit (CPU) of a control device, but the arithmetic processing may be performed outside. After the measurement of the natural frequency in the step 5, the gain of the controller 7 is returned to the gain in the first operation mode in a step 7. In a step 9, the operation in the second mode is terminated. Accordingly, the natural vibration mode can be detected with high sensitivity.SELECTED DRAWING: Figure 4
Inventors:
ONO TAKAAKI
Application Number:
JP2021140133A
Publication Date:
March 13, 2023
Filing Date:
August 30, 2021
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F16C32/04; F04D19/04
Domestic Patent References:
| JP2002188630A | 2002-07-05 | |||
| JPH08121477A | 1996-05-14 |
Foreign References:
| WO2021166816A1 | 2021-08-26 |
Attorney, Agent or Firm:
Masatoshi Shiina