Title:
磁気内面研磨装置および磁気内面研磨方法
Document Type and Number:
Japanese Patent JP5818338
Kind Code:
B2
Inventors:
Hitoshi Nishida
Ichiro Yoshino
Kunio Shimada
Ichiro Yoshino
Kunio Shimada
Application Number:
JP2011186757A
Publication Date:
November 18, 2015
Filing Date:
August 30, 2011
Export Citation:
Assignee:
Fujikoshi Co., Ltd.
National Institute of Technology
Kunio Shimada
National Institute of Technology
Kunio Shimada
International Classes:
B24B37/00; B24B5/40; B24B31/112
Domestic Patent References:
| JP2007253303A | ||||
| JP8132343A | ||||
| JP4025370A | ||||
| JP3184761A | ||||
| JP63221965A | ||||
| JP63212461A |
Foreign References:
| US7175511 |
Attorney, Agent or Firm:
Kosaku Umemoto
Akiko Okajima
Akiko Okajima