Title:
ELECTRIC CHARGE TRANSFER EQUIPMENT
Document Type and Number:
Japanese Patent JP3208595
Kind Code:
B2
Abstract:
PURPOSE: To increase the transfer efficiency of a signal charge by connecting to each of the transfer electrodes a resistor which corresponds to an additive capacity of each of the transfer electrodes which are arranged in many stages.
CONSTITUTION: A CCD image sensor is manufactured by forming a vertical resistor 2 due to an N-type impurity diffusion region in a P-type silicon substrate 1 and by arranging a transfer stage constituted of a set of four transfer electrodes G1, G2, G3 and G4 in the vertical direction (Y direction) through a gate insulating film 3. Each of the transfer electrodes G1-G4 have a different contact area with the vertical resistor 2 according to the formation pattern and therefore additive capacities C1-C4 are also different. A resistor R1-R4 to correspond to each additive capacity C1-C4 is connected to each transfer electrode G1-G4 to make time constants nearly the same. By this method, the roundishness of driving pulse V1-V4 to be applied to the transfer electrodes G1-G4 become almost the same and thereby the transfer efficiency of a signal charge 'e' can be increased.
Inventors:
Eiji Komatsu
Application Number:
JP9302792A
Publication Date:
September 17, 2001
Filing Date:
April 13, 1992
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L27/146; H01L21/339; H01L27/148; H01L29/762; H04N5/335; H04N5/341; H04N5/357; H04N5/369; H04N5/372; (IPC1-7): H01L29/762; H01L21/339; H04N5/335
Domestic Patent References:
| JP3184375A | ||||
| JP4152641A |
Attorney, Agent or Firm:
Hidemori Matsukuma