To provide a magnetic sensor capable of making the film thickness of a magnetic substance controllable to form a thin film, and capable of precluding large stress from generating in a Hall element.
A plurality of Hall elements 22a, 22b embedded with a prescribed distance from each other is provided on a semiconductor substrate 21, a substrate metal layer for electroplating a magnetic convergence plate is provided on the Hall elements 22a, 22b and the semiconductor substrate 21, and the magnetic convergence plate 23, having a magnetic amplification function, is provided on the substrate metal layer. A bottom face of the magnetic convergence plate 23 is arranged to cover at least partially an area of the plurality of Hall elements 22a, 22b, and the film thickness of the magnetic convergence plate is thinned down to 5-14 μm by electroplating. As a result, the stress applied to each Hall elements is reduced.
COPYRIGHT: (C)2008,JPO&INPIT
Makoto Kataoka
Yamagata day
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| JP2005534913A |
Eiji Fujita
Yoshikazu Tani