To provide a magnetic sensor with a magnetic material thickly formed on a region for performing magnetic sensing for magnetic amplification on a semiconductor substrate, and to provide a method of manufacturing the magnetic sensor.
The magnetic sensor includes a first metal layer 8 made of Ti or Ti-based material disposed on a semiconductor circuit 1 via a dielectric film 4, a second metal layer 9 made of Cu or Cu-based material disposed on the first metal layer 8, and the magnetic material 11 with a magnetic amplification function disposed on the second metal layer 9. The semiconductor circuit 1 is provided with an external connection terminal pad 2. An Au substrate metal layer 5 made of Ti or Ti-based material is disposed on the external connection terminal pad 2. An Au connection metal film 7 made of Au or Au-based material is disposed on the Au substrate metal layer 5.
ISHII HIRONORI
JPH09116207A | 1997-05-02 | |||
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