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Title:
MAGNETIC SENSOR AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2010038887
Kind Code:
A
Abstract:

To provide a magnetic sensor with a magnetic material thickly formed on a region for performing magnetic sensing for magnetic amplification on a semiconductor substrate, and to provide a method of manufacturing the magnetic sensor.

The magnetic sensor includes a first metal layer 8 made of Ti or Ti-based material disposed on a semiconductor circuit 1 via a dielectric film 4, a second metal layer 9 made of Cu or Cu-based material disposed on the first metal layer 8, and the magnetic material 11 with a magnetic amplification function disposed on the second metal layer 9. The semiconductor circuit 1 is provided with an external connection terminal pad 2. An Au substrate metal layer 5 made of Ti or Ti-based material is disposed on the external connection terminal pad 2. An Au connection metal film 7 made of Au or Au-based material is disposed on the Au substrate metal layer 5.


Inventors:
ISHIDA TAKUYA
ISHII HIRONORI
Application Number:
JP2008205834A
Publication Date:
February 18, 2010
Filing Date:
August 08, 2008
Export Citation:
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Assignee:
ASAHI KASEI DENSHI KK
International Classes:
G01R33/07; H01L43/06
Domestic Patent References:
JPH09116207A1997-05-02
JP2007108011A2007-04-26
JPH08204250A1996-08-09
JP2007278733A2007-10-25
Attorney, Agent or Firm:
Yoshikazu Tani



 
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