Title:
MAGNETIC SENSOR
Document Type and Number:
Japanese Patent JPS6313382
Kind Code:
A
Abstract:
PURPOSE:To impart high reliability, in which fine hole sections are hardly formed, to protective films with thin film thickness, to shorten the distance of the detection of a signal field and to increase an output by forming the first layer protective film onto a ferromagnetic thin-film shaped onto a base by using a protective film material, such as silicon monoxide, silicon dioxide, etc. and forming the second layer protective film consisting of a metallic material onto the first layer protective film. CONSTITUTION:A ferromagnetic thin-film 12 composed of a nickel alloy is shaped onto a base 11, and a first layer protective film 13 made up of silicon monoxide, silicon dioxide, silicon nitride, alumina, etc. is formed onto the ferromagnetic thin-film 12. A terminal 15 is fitted at the end section of the ferromagnetic thin-film 12 by solder 14, and a mounting section by the solder 14 is coated with terminal paints 16. A second layer protective film 17 consists of a metallic material coating the first layer protective film 13, and the terminal paints 16 also coat the end section of the second layer protective film 17. Accordingly, steam and a corrosive gas hardly intrude, thus preventing the corrosion and oxidation of the ferromagnetic thin-film 12, then improving durability while increasing a detection output.
Inventors:
MOTOKAWA MASARU
Application Number:
JP15699686A
Publication Date:
January 20, 1988
Filing Date:
July 03, 1986
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L43/02; G01R33/09; (IPC1-7): H01L43/02
Attorney, Agent or Firm:
Yoshihiro Morimoto