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Title:
MAGNETIC SCANNING/POSITIONING SYSTEM WITH AT LEAST TWO ITEMS OF DEGREE OF FREEDOM
Document Type and Number:
Japanese Patent JP2000152596
Kind Code:
A
Abstract:

To provide a magnetic scanning/positioning system which has at least two items of degree of freedom.

A magnetic scanning/positioning system includes a support base 6 to which magnets 7.1 and 7.2 are attached, a movable platform 1 to which at least two electric coils 2 are attached and suspension elements 4 with which the movable platform is elastically connected to the support base. The electric coils 2 are arranged on the movable platform horizontally to provide an essentially flat construction with the movable platform. As the flat construction is combined with the flat support base, a magnetic scanning/positioning system which is characterized in a latently small size, light weight and flat structure, fast response, low power consumption and a relatively large movement range, for instance maximum 10 mm, can be provided. The magnetic scanning/ positioning system with at least two items of degree of freedom can be used in the fields of a scanning probe microscope, data memory and imaging.


Inventors:
HAEBERLE WALTER
LUTWYCHE MARK I
VETTIGER PETER
Application Number:
JP30709599A
Publication Date:
May 30, 2000
Filing Date:
October 28, 1999
Export Citation:
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Assignee:
IBM
International Classes:
G05D3/00; H02K41/03; H02K41/035; H02N11/00; (IPC1-7): H02K41/03; G05D3/00; H02N11/00
Attorney, Agent or Firm:
Hiroshi Sakaguchi (1 person outside)