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Title:
磁気抵抗素子の製造方法、スパッタ成膜チャンバー、スパッタ成膜チャンバーを有する磁気抵抗素子の製造装置、プログラム、記憶媒体
Document Type and Number:
Japanese Patent JPWO2009154009
Kind Code:
A
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Inventors:
Shinji Furukawa
Koji Tsunekawa
Yoshinori Nagamine
Naoki Watanabe
Hiroyuki Hosoya
Application Number:
JP2009051213W
Publication Date:
November 24, 2011
Filing Date:
January 26, 2009
Export Citation:
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Assignee:
Canon ANELVA Corporation
International Classes:
C23C14/34; H01L43/12; H01L21/8246; G11B5/39; H01L43/08; H01L27/105
Attorney, Agent or Firm:
下山 治
大塚 康弘
大塚 康徳
木村 秀二
永川 行光
高柳 司郎



 
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