PURPOSE: To obtain a magnetoresistance effect element of high magnetic sensitivity, by making the direction of the axis of easy magnetization of a magnetically soft film intersect the direction of the axis of easy magnetization of a hard film.
CONSTITUTION: In a magnetoresistance element wherein a specified number of magnetically soft films composed of, e.g. Ni-Fe alloy and magnetically hard films composed of, e.g. Co, are laminated, the direction of the axis of easy magnetization of the soft films is made to intersect the direction of the axis of easy magnetization of the hard films, in the range from 0° to ±180°. Thereby the magnetic coupling force to the hard film is decreased, and the magnetization direction of the soft film becomes easy to be changed by an external magnetic field, so that a magnetoresistance effect element of high magnetic sensitivity can be obtained. The figure shows the directions of the axes of easy magnetization of the soft film (Ni-Fe alloy film) and the hard film (Co film) just after film formation, during application of high intensity magnetic field, and after removal of the high intensity magnetic field. Finally an element is obtained in which the direction of the axis of easy magnetization of the soft film intersects that of the hard film.