Title:
マグネトロンカソード
Document Type and Number:
Japanese Patent JP6959103
Kind Code:
B2
Abstract:
To provide a magnetron cathode which is operated at a low cathode temperature and is capable of securing a sufficient electron emission material and reducing preheating time, and which further eliminates effects due to thermal expansion thereby to achieve a long life time.SOLUTION: A magnetron cathode is configured such that granular tungsten having high melting point and high thermal conductivity and granular alumina (insulator) having high heat resistance are mixed to form a porous spiral body 14 (or a porous cylindrical body) and an oxide that is an electron emission material is impregnated in the porous spiral body 14. A heating voltage is applied on both ends of the porous spiral body 14. The porosity of the porous spiral body 14 is adjusted such that the range of the temperature coefficient of electric resistance thereof at 1,100°C is 2×10-3×10Ω/K.SELECTED DRAWING: Figure 1
Inventors:
Hideyuki Obata
Kunimi Komoto
Kunimi Komoto
Application Number:
JP2017212812A
Publication Date:
November 02, 2021
Filing Date:
November 02, 2017
Export Citation:
Assignee:
New Japan Radio Co., Ltd.
International Classes:
H01J23/04; H01J23/05
Domestic Patent References:
| JP61500290A | ||||
| JP4174940A | ||||
| JP8250782A | ||||
| JP5031268U | ||||
| JP63226851A | ||||
| JP63226852A |
Foreign References:
| US20140210340 |
Attorney, Agent or Firm:
Yasuto Ogata
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