Title:
マグネトロン及びその製造方法
Document Type and Number:
Japanese Patent JP6762827
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent the falling out of a gasket caused by vibration of an external force, transportation or the like, the gasket being used for preventing microwave leakage from a magnetron.SOLUTION: A gasket 1 of a mesh-like ring structure formed of a non-magnetic metal material is pressed into between an output yoke 2 and a waveguide, in a magnetron applied for a heat source of an electronic oven, plasma processing for semiconductor manufacturing, and the like. By providing an elastic ring-shaped metal plate 4 at the inside of the gasket 1, the gasket 1 is prevented from falling out.SELECTED DRAWING: Figure 2
Inventors:
Toi Sayuri
Application Number:
JP2016191614A
Publication Date:
September 30, 2020
Filing Date:
September 29, 2016
Export Citation:
Assignee:
Toshiba Hokuto Electronics Co., Ltd.
International Classes:
H01J23/12; H01J23/40
Domestic Patent References:
| JP56009661U | ||||
| JP56158060U | ||||
| JP52016849U | ||||
| JP8138566A |
Attorney, Agent or Firm:
Masanori Inoue