Title:
MAGNETRON
Document Type and Number:
Japanese Patent JP2005056785
Kind Code:
A
Abstract:
To provide a magnetron equipped with a cathode part with an elongated life in a simple structure.
The cathode part 13 is structured by heating a cathode base plate 10 at 400 to 600°C in hydrocarbon system atmosphere such as methane, having the gas react on the surface of the cathode base plate 10 by a thermal CVD method, whereby, with nickel, iron or the like existing on the surface of the cathode base plate 10 as a nucleus, an electron emission source with graphite nanofiber 11 vapor-phase grown on the surface of the cathode base plate 10 is pinched by end hats 12.
Inventors:
AIGA MASAYUKI
TSUKADA TOSHIYUKI
TSUKADA TOSHIYUKI
Application Number:
JP2003288752A
Publication Date:
March 03, 2005
Filing Date:
August 07, 2003
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01J1/304; H01J9/02; H01J23/04; H01J23/05; H01J25/587; (IPC1-7): H01J23/04; H01J23/05
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito