MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ARTICLE MANUFACTURING METHOD

Japanese Patent JP2023157729

A

To provide a technology advantageous for efficiently performing control satisfying required accuracy of each of a plurality of drive shafts at a limited calculation cost.SOLUTION: Provided is a management apparatus for managing a processing apparatus including a driver configured to drive a target object in regard to a plurality of drive axes, and a controller configured to control the driver using a neural network for which a parameter for outputting a manipulated variable to the target object is decided by reinforcement learning. The management apparatus includes a learning unit configured to decide the parameter of the neural network by reinforcement learning. The learning unit performs the reinforcement learning by evaluating a reward obtained from a control result of the target object by the controller, and relatively adjusts rewards regarding the respective drive axes in accordance with required precision for the respective drive axes.SELECTED DRAWING: Figure 1

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NAWATA AKIRA
MIKI YUICHIRO

JP2022067816A

October 26, 2023

April 15, 2022

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CANON KK

G03F7/20; G03F9/00; G05D3/12; H01L21/027; H01L21/68

Patent Attorney Corporation Otsuka International Patent Office

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