To manage carrying a cassette or the like quickly and accurately in a clean room.

An electronic module 10A which is installed on a specified position on a cassette 1b and a loaded object of the cassette which are carried automatically loaded with a worked and processed object is provided, and also a radio communication function and a ground station 22A to communicate with the electronic module are provided on a specified position of a carrier robot 30, and such information as a code to specify the cassette 1b and the loaded object of the cassette is recorded on a memory function of the electronic module 10A, and carrier management for the next process of the load can be performed by information read out by the ground station 22A of the carrier robot 30. In this case, the carrier robot 30A uses the cassette 1b for temporary storage for shipping and is connected to an upper management device or a control device of a transfer device by an information and communication function.