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Title:
MANAGEMENT METHOD OF CUTTING BLADE
Document Type and Number:
Japanese Patent JP2010162642
Kind Code:
A
Abstract:

To provide a management method of a cutting blade for cutting a wafer in a desired cutting depth even if a temperature of cutting water and a room temperature are changed.

The management method of a cutting blade 50 in a cutting machine is provided. The cutting machine is provided with: a chucking table, a cutting means for cutting a wafer; a cutting water supplying means; a blade detecting means 68 for detecting wear of a cutting edge; and a reference position detecting means of the cutting blade 50. The method has a temperature detecting step of detecting a cutting water temperature and a room temperature where the cutting machine is installed; the reference position detecting step of detecting a reference position of cutting edge 50a of the cutting blade 50; a reference position correcting step of detecting a wear amount of the cutting blade 50, finding a difference between the reference position of the cutting edge 50a and that of the cutting blade 50, and correcting the reference position of the cutting edge 50a; and a resetting step of always carrying out the temperature detecting step, and carrying out the reference position detecting step again when detecting a cutting water temperature different from the cutting water temperature by a first predetermined value or more, or when detecting a room temperature different from the room temperature by a second predetermined value or more.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
SEKIYA KAZUMA
Application Number:
JP2009006640A
Publication Date:
July 29, 2010
Filing Date:
January 15, 2009
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B49/10; B24B49/12; B24B49/14
Domestic Patent References:
JPH0569437A1993-03-23
JPH10177973A1998-06-30
JP2001110754A2001-04-20
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito