Title:
MANIFOLD AND SYSTEM EQUIPPED WITH THE SAME USEFUL FOR DELIVERING CHEMICALS
Document Type and Number:
Japanese Patent JP2004006621
Kind Code:
A
Abstract:
To provide a bulk chemical replenishing delivery system for highly pure raw material chemicals in which a bulk container can be replaced without contamination.
The bulk chemical replenishing delivery system is equipped with a manifold 22. The manifold 22 comprises a treatment line separating valve 70 for separating the bulk container 20 from a part of a replenishing line 44, a carrier gas separating valve 71 for separating the bulk container from a gas source, a low pressure gas vent valve 73 for separating a vacuum source from a carrier gas line, and a container bypass valve 72 for bypassing a pressure source and the vacuum source to at least a part of the replenishing line which is not separated by the treatment line separating valve.
Inventors:
SIEGELE STEPHEN H
NOAH CRAIG M
GREGG JOHN N
NOAH CRAIG M
GREGG JOHN N
Application Number:
JP2002370667A
Publication Date:
January 08, 2004
Filing Date:
December 20, 2002
Export Citation:
Assignee:
ADVANCED TECH MATERIALS
International Classes:
B01J4/00; G01F23/60; B01L3/08; B67D7/02; B67D7/84; C23C16/44; C23C16/448; C23C16/52; F17C1/00; F17C5/00; F17C5/02; F17C5/06; F17C6/00; F17C7/00; F17C9/00; F17C13/02; F17C13/04; G01F23/24; G01F23/26; G01F23/292; G01F23/74; G05D9/12; H01L21/205; H01L21/31; G01F23/70; G01F23/72; (IPC1-7): H01L21/31
Attorney, Agent or Firm:
Aoyama Aoi
Osamu Kawamiya
Hiroshi Yamazaki
Osamu Kawamiya
Hiroshi Yamazaki