PURPOSE: To obtain the titled highly reliable sheet wherein the arrangement of conductive passages can be selected freely, and the density of the conductive passages can be readily changed, by forming a conductive layer on a part of an electrically insulating elastomer sheet, the part being photoetched.
CONSTITUTION: A masking plate 3 having a desired opening pattern is placed on the surface of a metal substrate on which an ultraviolet-curing type uncured elastomer 2 is applied, and an ultraviolet beam 5 is irradiated. The parts of the elastomer 2a corresponding to the exposed parts 3a are cured, and the elastomer of the uncured parts 2b is removed by a solvent or the like. Metal conductors 4 are deposited on the parts on the metal substrate where the elastomer has been removed n a thickness approximately equal to or more than the thickness of the elastomer 2, and the cured elastomer 2a including the conductors 4 is removed from the substrate 1. Thus the intended anisotropically conductive elastomer sheet can be obtained which has the conductivity only across the thickness of the elastomer.
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