MANUFACTURE OF CERAMIC DIAPHRAGM STRUCTURE - Nippon Insulator Co., Ltd.

Title:

MANUFACTURE OF CERAMIC DIAPHRAGM STRUCTURE

Document Type and Number:

Japanese Patent JP3462400

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To suppres convex deformation, distortion, and irregularity of a diaphragm section by using a ceramic green base body and a ceramic green sheet which meet specified conditions and the mean difference in sintering temperature of the ceramic green base body expressed by a specified formula is less than zero and its mean difference in shrinkage factor also less than zero.
SOLUTION: A ceramic green base body and a ceramic green sheet meet specified conditions. The requirements for sintering are that the mean difference in sintering temperature of the green base body expressed by formula I less than zero and its average difference in shrinkage factor of the green base body expressed by formula II is also less than zero. In formula I and formula II, N is the number of the constituent layers of the green base body, T70 (base body)n and S (base body)n are the sintering temperature in the process of sintering (°C) and the shrinkage factor (%) respectively of the nth layer from the lowest layer of the constituent layers of the green base body when the green sheet stacked-side is placed upward, tn is the distance from the lower face of the nth layer from the lowest layer of the burned base body to the neutral line of the base and tn+1 is the distance from the upper face of the nth layer to the neutral line of the burned base, with a face lower than the neutral line added with a (-) sign and a face higher than the neutral line added with a (+) sign.

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Inventors:

Yukihisa Takeuchi
Tsutomu Nanataki
Katsuyuki Takeuchi

Application Number:

JP26067798A

Publication Date:

November 05, 2003

Filing Date:

September 14, 1998

Export Citation:

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Assignee:

Nippon Insulator Co., Ltd.

International Classes:

B32B18/00; C04B35/64; H01L41/09; H01L41/22; H01L41/43; (IPC1-7): H01L41/22; C04B35/64; H01L41/09

Domestic Patent References:

JP10117024A
JP8130334A
JP851238A
JP8148697A

Attorney, Agent or Firm:

Ippei Watanabe

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