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Patent Searching and Data


Title:
MANUFACTURE OF CO-CU ARTIFICIAL GRATING FILM
Document Type and Number:
Japanese Patent JPH06112078
Kind Code:
A
Abstract:

PURPOSE: To obtain a Co-Cu artificial grating film large in a MR (magnetic resistance) ratio by a method wherein a sputtering process is carried out in an inert gas atmosphere of prescribed pressure to alternately laminate a layer mainly formed of Co and another layer mainly formed of Cu an a non-magnetic support for the formation of a Co-Cu artificial grating film.

CONSTITUTION: A sputtering process is carried out in an inert gas of 0.07 to 0.5Pa to alternately laminate a layer mainly formed of Co and another layer mainly formed of Cu on a non-magnetic support for the formation of a Co-Cu artificial grating film. At this point, the layer mainly formed of Co and the other layer mainly formed of Cu are formed as thick as 0.5 to 3nm and 1.7 to 4nm respectively. By this setup, a Co-Cu artificial grating film possessed of a large MR ratio even in a magnetic field lower than 0.1T at a room temperature or below can be obtained.


Inventors:
YAMAUCHI KAZUSHI
KANO HIROSHI
Application Number:
JP28243992A
Publication Date:
April 22, 1994
Filing Date:
September 28, 1992
Export Citation:
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Assignee:
SONY CORP
International Classes:
H01F10/16; H01F10/08; H01F10/30; H01F10/32; H01F41/18; (IPC1-7): H01F41/18; H01F10/16; H01F10/30
Attorney, Agent or Firm:
Akira Koike (2 outside)