Title:
MANUFACTURE OF COLOR FILTER
Document Type and Number:
Japanese Patent JPH03120516
Kind Code:
A
Abstract:
PURPOSE:To make the decoloring of a filter layer hard to occur and to extend the service life of it by preventing peeling occurring by performing a vacuum heat treatment to expel water after forming a color filter layer and before forming a protective film to cover a transference electrode. CONSTITUTION:A light shielding part 15 and a window 16 are formed on a lower substrate 12, and one picture element is formed by forming the patterns of three primary color of red R, green G, and blue B on the window 16, and a common transference electrode is formed by applying an ITO film 21 by sputtering on them. Following that, the substrate 12 is inputted to vacuum, and a heat treatment at, for example, 110 deg.C for 1-4 hours is applied, thereby, the water in filter layers 17-19 and the transference electrode 21 are expelled, and after that, the protective film 22 of SiO2, etc., is formed. Therefore, since an adverse influence due to the water can be eliminated, it is possible to make the decoloring or deterioration of the filter layers 17-19 hard to occur, and also, the peeling of the electrode 21 or the protective film 22 due to the expan sion of internal water can be prevented, which extends the service life.
Inventors:
HIRAMOTO HIROYUKI
SAKAI SATORU
KOBAYASHI SEIICHIRO
SAKAI SATORU
KOBAYASHI SEIICHIRO
Application Number:
JP25908489A
Publication Date:
May 22, 1991
Filing Date:
October 04, 1989
Export Citation:
Assignee:
STANLEY ELECTRIC CO LTD
International Classes:
G02B5/20; G02F1/1333; G02F1/1335; (IPC1-7): G02B5/20; G02F1/1333; G02F1/1335
Domestic Patent References:
| JPS62299941A | 1987-12-26 | |||
| JPS62127702A | 1987-06-10 |
Attorney, Agent or Firm:
Keishiro Takahashi