PURPOSE: To obtain a compound oxide superconductor thin film having a high superconduction critical temperature and a uniform composition by carrying out physical vacuum evaporation while radiating an oxygen ion beam to a base to a base plate where evaporated particles accumulate.
CONSTITUTION: An equipment in used mainly comprises a chamber 1 and a vacuum evaporation source 2 arranged in the chamber 1, an electron gun 3 to add induction heating to the vacuum evaporation source 2 and a base plate 5 installed opposite to the vacuum evaporation source 2 to form a thin film on its surface. By making compound oxide the vacuum evaporation source 2 and carrying out physical vacuum evaporation while radiating an oxygen ion beam, a compound oxide superconductor thin film is made. But preferably, the radiation of the oxygen ion beam is carried out preferably by changing the intensity of the beam. A thin film made of a compound oxide superconductive material having a uniform composition and organization with a high critical temperature can be obtained by the process.
| JPH08167745 | MANUFCTURE OF OXIDE SUPERCONDUCTING ELEMENT |
| WO/2019/025019 | JOSEPHSON JUNCTIONS FOR IMPROVED QUBITS |
| JPH03193696 | PRODUCTION OF SINGLE CRYSTAL OXIDE SUPERCONDUCTING THIN FILM |
ITOZAKI HIDEO
TANAKA SABURO
YATSU SHUJI
JODAI TETSUJI
| JPS63224112A | 1988-09-19 |
Next Patent: MANUFACTURE OF CERAMICS SUPERCONDUCTIVE WIRE MATERIAL