Title:
MANUFACTURE OF DIAMOND HEAT SINK
Document Type and Number:
Japanese Patent JP3028660
Kind Code:
B2
Abstract:
PURPOSE: To provide a diamond heat sink manufacturing method by which a diamond heat sink can be easily manufactured at a high yield and high productivity.
CONSTITUTION: A polycrystalline body of diamond is manufactured by a vapor- phase synthesizing method (Step 101). A metallizing treatment is performed on the surface of the polycrystalline body (Step 102). Then a grooving treatment is performed on the metallized surface of the polycrystalline body by using a YAG laser (Step 103). After a groove is formed, a wedge, etc., is put in the groove and pressurized. As a result, the polycrystalline body of diamond is divided into two parts along the groove (Step 104). It is also possible to perform the metallizing treatment (Step 113) on the surface of the polycrystalline body after performing the grooving treatment (Step 112) on the surface of the polycrystalline body of diamond manufactured by the vapor-phase synthesizing method.
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Inventors:
Takehisa Iguchi
Tsutomu Nakamura
Tetsuo Nakai
Tsutomu Nakamura
Tetsuo Nakai
Application Number:
JP27283091A
Publication Date:
April 04, 2000
Filing Date:
October 21, 1991
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/48; H01L23/373; (IPC1-7): H01L23/373
Attorney, Agent or Firm:
Kenichiro Sano (2 outside)