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Title:
MANUFACTURE OF ELECTRON EMITTING ELEMENT, ELECTION EMITTING ELEMENT, ELECTRON SOURCE BASE PLATE, PICTURE IMAGE FORMING DEVICE, AND DROPLET IMPARTING DEVICE
Document Type and Number:
Japanese Patent JPH10283917
Kind Code:
A
Abstract:

To realize inexpensiveness, form an element electrode, having uniform large area film thickness, and obtain a uniform surface element with good yield by nearly concurrently imparting plural deoplets, including a material for forming an element electrode on a base plate, so that the mating and adjoining droplets can be overlapped with each other.

An insulated base plate 1 is washed and dried, and then droplets 7 of a solution, including a material for forming element electrodes 2 and 3, are imparted in order by using the No.4, 5, 6, and 7 nozzles of droplet imparting device 8. Then, the droplets are heat-treated at a temperature of 300°-600°C to vaporize a solvent to form the element electrodes 2 and 3. A row directional wiring, connected to one side of the element electrodes, an insulating film, and a line directional wiring, connected to another side electron electrode, are formed in order; to form a conductive thin film. Pattern forming for the element electrodes 2 and 3 can be omitted by applying voltage between the element electrodes 2 and 3, and electrification-treating the conductive thin film to form an electron emitting part. Also, the film thickness in the electron electrodes 2 and 3 can be uniform by concurrently imparting the droplets.


Inventors:
HASEGAWA MITSUTOSHI
Application Number:
JP10401597A
Publication Date:
October 23, 1998
Filing Date:
April 08, 1997
Export Citation:
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Assignee:
CANON KK
International Classes:
H01J9/02; H01J1/30; H01J1/316; H01J31/12; (IPC1-7): H01J9/02; H01J1/30; H01J31/12
Attorney, Agent or Firm:
Tetsuya Ito (2 outside)