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Patent Searching and Data


Title:
MANUFACTURE OF EMITTER
Document Type and Number:
Japanese Patent JPH07105834
Kind Code:
A
Abstract:

PURPOSE: To manufacture an emitter having a large top end radius.

CONSTITUTION: The gap between the top end of an emitter having a top end radius of 0.2μm-0.8μm and a discharge plate 7 is set to about 0.5mm. A negative low voltage is applied between the emitter 1 and the discharge plate 7. The emitter 1 is gradually approached to the discharge plate 7. When the gap is less than 1.0μm, a minute discharge is generated between the emitter 1 and the discharge plate 7, a discharge current is carried between the both to weld the top end of the emitter by the Joule heat, and recrystallized into a sphere having an emitter top end radius of about 1.0μm or more. A low voltage power source 13 is cut off, and a vacuum vessel 8 is laid in high vacuum state. The gap between the emitter 1 and the discharge electrode is returned to the original gap of about 0.5mm. An emission circuit 16 is operated to emit a thermoelectric field emitting electron from the top end of the emitter 1, 100 crystal orientation is grown on the top end of the emitter, and a parallel part 1H' and a facet 1F' having a large diameter are formed.


Inventors:
HONDA KAZUHIRO
TANAKA SHUNJI
SHIBUKI YOICHI
Application Number:
JP25352493A
Publication Date:
April 21, 1995
Filing Date:
October 12, 1993
Export Citation:
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Assignee:
JEOL LTD
International Classes:
H01J9/02; (IPC1-7): H01J9/02