Title:
MANUFACTURE OF FIELD EMISSION ELEMENT
Document Type and Number:
Japanese Patent JP3546606
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To manufacture a field emission element by which stable field emission is conducted even at a low degree of vacuum.
SOLUTION: An cathode substrate 1 in which emitters 8 are formed and a substrate made of emitter material or an anode substrate 10 made of the emitter material formed of a thin film or a thick film are oppositely arranged in a vacuum vessel 0, and drive voltages (VBE, VA) are applied across the cathode substrate 1 and the anode substrate 10 so that electron beams emitted from the cathode substrate 1 are hit to the anode substrate 10 and the emitter material is electric field-deposited on the emitters 8 so as to manufacture field emission elements. The emitters 8-formed cathode substrate 1 and an anode substrate are confronting arranged in the vacuum vessel 0, and in a state where the drive voltages (VBE, VA) are applied across the cathode substrate 1 and the anode substrate, hydrocarbon gas is introduced so that the electron beams emitted from the cathode substrate 1 are hit to the anode substrate and the ions of the hydrocarbon gas are adsorbed on the emitters 8 so as to manufacture the field emission elements.
Inventors:
Shigeo Ito
Takehiro Niiyama
Takehiro Niiyama
Application Number:
JP22076396A
Publication Date:
July 28, 2004
Filing Date:
August 05, 1996
Export Citation:
Assignee:
Futaba Electronics Co., Ltd.
International Classes:
H01J9/02; (IPC1-7): H01J9/02
Domestic Patent References:
| JP6199594A | ||||
| JP7065700A | ||||
| JP9306336A | ||||
| JP7078581A | ||||
| JP3274633A |
Attorney, Agent or Firm:
Atsuo Waki
Yasuo Asami
Hideo Takahashi
Yasuo Asami
Hideo Takahashi
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