Title:
微粒状電気メッキアノードの製造
Document Type and Number:
Japanese Patent JP4898087
Kind Code:
B2
Abstract:
A continuously cast copper ingot is made by a procedure in which turbulence is imparted to the metal/solid interface during the casting operation. The ingot is then hot worked to form a billet having a smaller average grain size and a larger diameter than possible in the past. The billet is especially useful for making electroplating anodes used in the damascene process for making copper interconnects in silicon wafers.
Inventors:
William Tup, William Jei
Application Number:
JP2003510201A
Publication Date:
March 14, 2012
Filing Date:
September 20, 2001
Export Citation:
Assignee:
Brassille Wellman Incorporated
International Classes:
B21B3/00; B21B1/02; B22D7/00; B22D11/00; C22F1/08; C25D17/10
Domestic Patent References:
| JPH10195611A | 1998-07-28 | |||
| JPH10330923A | 1998-12-15 |
Foreign References:
| US5279353A | 1994-01-18 | |||
| US4315538A | 1982-02-16 |
Attorney, Agent or Firm:
Patent business corporation Odashima patent office