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Patent Searching and Data


Title:
MANUFACTURE OF HEAT SINK
Document Type and Number:
Japanese Patent JPH03136266
Kind Code:
A
Abstract:

PURPOSE: To protect a bonding wire against a shortcircuit trouble keeping a heat sink excellent in heat dissipating property by a method wherein a metal layer whose oxide film functions, at least, as an insulator is provided onto a heat sink board, an electrode is patterned thereon, and the part other than the electrode is oxidized.

CONSTITUTION: A metal layer 13 whose oxide film functions, at least, as an insulator is provided onto a heat sink board 1, and electrode 3 is patterned thereon, and the part other than the electrode 3 is oxidized. For instance, a Cr layer 14 and an Au layer 15 are evaporated on the rear side of an Si board 1, an Al layer 13, a Cr layer 12, and an Au layer 15 are successively evaporated on the surface of the Si board 1, and the Cr layer 12 and the Au layer 11 other than a part where the electrode 3 is formed are removed through photolithography and etching. In succession, the exposed Al layer 13 is oxidized using an oxidizing agent to form an Al2O3 film 4 on it, and thus a heat sink on which the electrode 3 is patterned can be obtained.


Inventors:
HISAMITSU MAMORU
Application Number:
JP27469989A
Publication Date:
June 11, 1991
Filing Date:
October 20, 1989
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
H01L23/36; (IPC1-7): H01L23/36
Attorney, Agent or Firm:
Yasuo Ishii