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Title:
MANUFACTURE OF LIGHT CONTROL DEVICE
Document Type and Number:
Japanese Patent JPH07168043
Kind Code:
A
Abstract:

PURPOSE: To precisely manufacture a light control device having a buffer layer only immediate under an electrode in the lessened number of processes.

CONSTITUTION: A buffer layer 3 made of an insulating material and an electrode film 4 made of a conductive material are successively formed on a substrate 1 in which an optical waveguide 2 is formed and a resist film 5 with an optional shape is formed in a part of the electrode film 4. Of the electrode film 4, the part not coated with the resist film 5 is removed and of the buffer layer 3, the part not coated with the electrode film 4 and with the resist film 5 is removed. Consequently, the buffer layer 3 and the electrode film 4 are shaped into the shape of the resist film. Finally, the resist film 5 is removed.


Inventors:
FUKUDA MASASHI
Application Number:
JP31517593A
Publication Date:
July 04, 1995
Filing Date:
December 15, 1993
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B6/13; (IPC1-7): G02B6/13
Attorney, Agent or Firm:
Sanshin Iwao (2 people outside)



 
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