Title:
MANUFACTURE OF LIQUID CRYSTAL DISPLAY DEVICE
Document Type and Number:
Japanese Patent JPH03249624
Kind Code:
A
Abstract:
PURPOSE:To prevent electrostatic breakage in manufacturing process by removing a semiconductor layer in the same process with the selective removal of a protection film after the protection film is deposited on the surface of a transparent substrate, and disconnecting the short-circuited wiring. CONSTITUTION:Semiconductor layers AS and DO which connect the short- circuited wirings GSW and DSW decrease in resistance value through photoconducting operation when irradiated with light, thereby short-circuiting the short-circuited wirings mutually. Namely, the short-circuit wirings are short- circuited mutually by irradiating the semiconductor layers with the light throughout the process wherein a lower transparent glass substrate SUB1 is taken out of the jig of a CVD device after the protection film PSV1 is deposited by a plasma CVD method which easily generates static electricity in manufacturing the liquid crystal display device. Consequently, an electrostatic breakdown between a scanning signal line and a video signal line, a source electrode or drain electrode and a gate electrode, etc., is precluded.
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Inventors:
TANIGUCHI HIDEAKI
NIWA SUSUMU
ORITSUKI RYOJI
TSUKII NORIO
SASANO AKIRA
NIWA SUSUMU
ORITSUKI RYOJI
TSUKII NORIO
SASANO AKIRA
Application Number:
JP4597590A
Publication Date:
November 07, 1991
Filing Date:
February 28, 1990
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G02F1/1337; G02F1/136; G02F1/1368; G02F1/1362; (IPC1-7): G02F1/1337; G02F1/136
Attorney, Agent or Firm:
Junnosuke Nakamura (1 outside)