Title:
MANUFACTURE OF LIQUID CRYSTAL DISPLAY DEVICE
Document Type and Number:
Japanese Patent JPH06295924
Kind Code:
A
Abstract:
PURPOSE: To avoid the current effect of a transparent electrode and reduce the contact resistance of a source/drain by depositing a heavily doped semicon ductor layer and metal on the entire surface and selectively etching to form data lines and source electrodes connected to source regions. CONSTITUTION: After continuously depositing a heavily doped n-type polycrystalline Si 11 and metal 12 such as Al, a photosensitive film 13 is coated thereon, exposed and developed. When this film 13 is developed, the electrolyte of the developer liq. will lower along the Al bank but never contacts a transparent electrode 9 as the Si 11 acts as a barriers, thus preventing the current effect. The heavily doped n-type polycrystalline Si 11 directly contacts drain/ source regions 6a, 6b to facilitate the contact resistance control. The Si 11 and metal layer 12 are laminated to form a double structure which prevents the short-circuit.
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Inventors:
YANA AKIHIDE
Application Number:
JP34635193A
Publication Date:
October 21, 1994
Filing Date:
December 22, 1993
Export Citation:
Assignee:
GOLD STAR CO
International Classes:
G02F1/1343; G02F1/136; G02F1/1368; H01L21/336; H01L21/77; H01L21/84; H01L29/78; H01L29/786; (IPC1-7): H01L21/336; G02F1/1343; G02F1/136; H01L29/784
Attorney, Agent or Firm:
Kazuo Sato (3 others)