PURPOSE: To obtain the manufacturing method, of a magneto-optical recording medium, wherein, when a recording film is formed on a substrate by a magnetron sputtering method by using a plurality of targets having different constituent elements, the recording film whose consumption is not fluctuated in the whole region on the substrate can be formed.
CONSTITUTION: A plurality of targets 15, 16, 17 whose constituent element is different from each other are used, the plurality of targets are irradiated with a sputtering gas, components for the plurality of targets 15, 16, 17 are sputtered on a substrate 1, the components are applied to the substrate 1, the components are alloyed and a recording film 3-1 composed of a magnetic film is formed. When a substrate installation stand 6 is heated while the film 3-1 is being formed, the circumference of the substrate 1 is heated, and the recording film 3-1 is formed while the film is being heated.
JPH1021596 | MAGNETO-OPTICAL RECORDING MEDIUM AND OPTICAL REPRODUCING DEVICE |
JPH0636369 | MAGNETO-OPTICAL RECORDING MEDIUM |
JPH01124132 | RECORDING METHOD |
NANBA YOSHIYUKI
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