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Patent Searching and Data


Title:
MANUFACTURE OF MAGNETO-OPTICAL RECORDING MEIDUM
Document Type and Number:
Japanese Patent JPH06124489
Kind Code:
A
Abstract:

PURPOSE: To obtain the manufacturing method, of a magneto-optical recording medium, wherein, when a recording film is formed on a substrate by a magnetron sputtering method by using a plurality of targets having different constituent elements, the recording film whose consumption is not fluctuated in the whole region on the substrate can be formed.

CONSTITUTION: A plurality of targets 15, 16, 17 whose constituent element is different from each other are used, the plurality of targets are irradiated with a sputtering gas, components for the plurality of targets 15, 16, 17 are sputtered on a substrate 1, the components are applied to the substrate 1, the components are alloyed and a recording film 3-1 composed of a magnetic film is formed. When a substrate installation stand 6 is heated while the film 3-1 is being formed, the circumference of the substrate 1 is heated, and the recording film 3-1 is formed while the film is being heated.


Inventors:
MIHARA MOTONOBU
NANBA YOSHIYUKI
Application Number:
JP27330992A
Publication Date:
May 06, 1994
Filing Date:
October 13, 1992
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G11B11/10; G11B11/105; (IPC1-7): G11B11/10
Attorney, Agent or Firm:
Teiichi