Title:
MANUFACTURE OF PROBE FOR SCANNING TUNNELLING MICROSCOPE
Document Type and Number:
Japanese Patent JPH04308627
Kind Code:
A
Abstract:
PURPOSE: To provide manufacture of a probe for a scanning tunnelling microscope having a smallradius of curvature at a forward end, and having a clean surface.
CONSTITUTION: A voltage is applied on a low-pressure gas atmosphere using a tungsten wire 1 for a cathode, a discharge is generated only close to a specified part of the tungsten wire, and it is cut by dry etching. After cutting, application of the voltage to the metal thin wire 1 at least on one side of cutting is stopped instantaneously.
Inventors:
TODA TAKAO
KUSUMOTO OSAMU
SHIBATA MOTOJI
KUSUMOTO OSAMU
SHIBATA MOTOJI
Application Number:
JP7538591A
Publication Date:
October 30, 1992
Filing Date:
April 08, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B26F3/00; C23F4/00; G01Q60/16; H01J9/02; H01J37/28; (IPC1-7): B26F3/00; C23F4/00; H01J9/02; H01J37/28
Attorney, Agent or Firm:
Masamichi Matsuda