PURPOSE: To obtain surface form information and magnetic information of high sensitivity and high resolution in good reproducibility by constituting a probe, provided in a point end of a cantilever, of the sharp probe of ≤55° point end vertical angle and ≤50nm radius of curvature.
CONSTITUTION: A cantilever 2, whose one end is fixed to a supporter 4, is prepared, and a probe member 5, which constitutes a probe 6, is mounted to adhere to a free end side of the cantilever 2. Further a focusing ion beam is irradiated to a point end part of the probe member 5 to perform work into a sharp form, so that the point end part of the probe 6 is worked into about 20° vertical angle θ3 and ≤50nm radius of curvature. Interatom force and magnetic force, acting between this probe 6 and a sample, are detected by the probe 6 to generate deflection in the cantilever 2, and surface form information of the sample further accurate magnetic force information are obtained by detecting an amount of this deflection by a displacement detecting means provided behind the cantilever 2. In this way, the probe suitable for surface information observation of interatom force, magnetic force, etc., of high resolution and high sensitivity is obtained.
| JPH05215509 | SCANNING-TYPE PROBE MICROSCOPE AND MANUFACTURE OF PROBE THEREOF |
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HOSAKA SUMIO
ONISHI TAKESHI
TANAKA SHINJI
ISHITANI TORU
