PURPOSE: To manufacture a titled quartz glass pipe while avoiding the thermal dissociation of SiO2 by putting a rod consisting of a specified metal and its alloy having a m.p. higher than that of quartz glass and axial symmetry higher than that of quartz glass in an initial quartz glass pipe, hermetically sealing the pipe in vacuum, and pulling out the rod under specified conditions to form the titled pipe.
CONSTITUTION: Rod 2 consisting of Mo and an Mo-base alloy, Ta and a Ta-base alloy or W and a W-base alloy and having a predetermined size is put in initial quartz glass pipe 1, and pipe 1 is evacuated and hermetically sealed to maintain the degree of the vacuum at ≤1Torr. The atmospheric pressure of pipe 1 is then returned to ordinary pressure and pipe 1 is passed through a circular furnace of 1200W1500°C at 4mm/min rate to stick pipe 1 to the outside of rod 2 by softening. After removing both ends with a cutter, pipe 1 is attached to a glass lathe and turned around rod 2 as an axis to cut the outside periferal surface of pipe 1, resulting in a uniform thickness. Finally, rod 2 is pulled out to obtain a product.
ITOU TERUZOU
KIMURA TOSHIROU
